Max voltage: 3kV (B1505A SMU)
Max current: 1.5kA
Max temperature: 400℃ (with probe station)
Keysight B1505A with N1265A UHC Expander
- 1 × HVSMU (B1513C) – High Voltage SMU
- 4 × MCSMU (B1514A) – Medium Current SMU
- 1 × MFCMU (B1520A) – Multi-Frequency CMU
-1 × GNDU (B1500) – Ground Unit
- N1265A 내장 Selector 활용
On-wafer 상태 특성 및 공정 평가
-Breakdown
-Leakage
-I-V / C-V
-Gate Charge
Power Semiconductor 특성 분석
Analyzer 및 PCL meter 연동 측정